Compliance auditISO 14644-14:2026

ISO 14644-14:2026 — Cleanrooms: suitability of equipment for use (particle concentration)

Methodology for assessing the suitability of equipment (machines, instruments, tools) for use in cleanrooms, by measuring airborne particle concentration and relating it to the ISO 14644-1 classification.

control points
47
anchored clauses
17
Clauses covered
6

Clauses covered

General sequence of the assessment (Clause 4)24
Visual inspection (Clause 5)25
Cleanroom-compatible design principles (Clause 6.1)16.1
Assessment procedure by particle measurement (Clause 6.2)96.2.2 · 6.2.3 · 6.2.4 · 6.2.5 · 6.2.6 · 6.2.7 · 6.2.8 · 6.2.9 · 6.2.10
Documentation (Clause 7)47.2 · 7.3 · 7.4 · 7.5
Cleanroom suitability statement (Clause 8)18

Scale

CompliantOpportunity for improvementNon-compliantNot applicable

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